X-Perience in High-End Analytic Tools

PHI 710 Auger Scanning Auger Nanoprobe

PHI-710-5cm

A revolution in high productivity analysis: 710 Auger

The PHI 710 Scanning Auger Nanoprobe provides high performance Auger (AES) Spectral Analysis, Auger imaging, and sputter depth profiling of complex materials. The PHI 710 is the only Auger with a CMA Analyzer. The CMA enables our customers to analyze “real world”, topographical samples.

New features introduced with the 710:

  • Improved imaging capabilities
  • Chemical state mapping with spectra at each pixel
  • Remote diagnostics capabilities

Made to measure catalysts, metals, and electronic devices.

  • 3 nm SE image resolution at the analysis position
  • 8 nm Auger resolution with high sensitivity
  • Improved imaging capabilities
  • Chemical state mapping with spectra at each pixel
  • Remote diagnostics capabilities.
  • Thin film analysis features including: multi-point thin film analysis, low voltage (100-500 V) sputtering, Compucentric Zalar Rotation™ and an array of advanced data reduction tools in PHI MultiPak Software
  • Superior thermal isolation
  • High resistance to vibrations
  • Coaxial electron gun and analyzer geometry
  • Low voltage sputtering by floating column ion gun
  • Low energy ion beam assisted charge neutralization
  • Compucentric Zalar Rotation
  • Automated multi-sample analysis with precision, motorized sample stage

Semiconductor

  • AES Depth Profiling of P Doped Si Nanowire
  • Auger Analysis of Boron Oxide Crystals formed by CBN
  • Characterizing electrically isolated Bond Pads
  • Compucentric Zalar Profile of an Al Pad
  • Defect Navigation on Wafer Pieces

Materials Research

  • Characterizing Nanoscale Precipitates in Steel
  • Fracture Anaylsis of an embrittled Low Alloy Steel