X-Perience in High-End Analytic Tools

PHI VersaProbe II


Super Resolution: VersaProbe II

The VersaProbe II incorporates market leading, unmatched technology including the analysis of X-ray sensitive and/ or magnetic samples. Higher count rate and thus faster measurements.

  • Large area XPS and Micro area XPS possible by Raster scanned, micro-focused, monochromatic x-ray beam
  • The integral floating column argon ion gun provides an impressive sputter depth profiling capability for inorganic thin film structures.
  • Optional C60+ and Ar2500+ cluster source ion guns provide a unique and powerful organic sputter depth profiling capability.
  • X-ray microprobe with < 10µm spatial resolution
  • Raster scanned, micro-focused, monochromatic x-ray beam
  • X-ray induced secondary electron imaging (SXI)
  • Dual beam charge neutralization
  • Chemical state imaging
  • Thin film analysis (inorganic and organic)
  • Compucentric Zalar Rotation
  • Software: SmartSoft (new, intuitive for control ) and Multipack (Data reduction)
  • Multi-Technique Analysis ( SAM and UPS Option)
  • Versatile Test Chamber Configuration
  • 5 axis automated sample manipulator
  • Options (like 10 kV C60 ion gun, 20kV C60 ion gun, 20 kV Argon gas cluster ion gun)


  • Depth Profiling
  • Additive Migration
  • Cleaning Polymer Surface with the PHI-06 C60 Sputter

Thin Films and Coatings

  • XPS Profiling of Organic PV Films
  • Mapping Motor Oil Additives on a Cam Shaft Lobe


  • Automated QC Analysis Silicone Detection
  • Hard Disk Surface Composition Maps