Correlative Probe and Electron Microscopy (CPEM)

CPEM principle

CPEM enables simultaneous detection and acquisition of AFM and SEM signals at the same time and in the same place.

How does it work?

During scanning, the electron beam points close to the AFM tip with a constant offset. They both remain static, while the sample is moving with Lite Scope’s piezo scanner. This way, data from AFM and SEM microscopes can be acquired at the same time, in the same place, and under the same conditions.

The next level of Correlative Imaging – AFM in SEM

The Correlative Probe (AFM) and Electron Microscopy, shortly CPEM, is a novel method of multidimensional correlative imaging.


  • Simultaneous acquisition of data of the SEM and AFM, that can be easily correlated into a 3D image.
  • It eliminates the need for double localization of the region of interest
  • Highly precise imaging and alignment
  • Advanced data correlation
  • Correlate both acquired AFM and SEM images in real-time!


  • CPEM provides multidimensional correlative imaging – images from a Scanning Electron Microscope are extended into 3D.
  • Using CPEM, it is possible to distinguish the topographic and material contrast in SEM images quickly and accurately.
  • CPEM correlates, in an appropriate fashion, two or more SEM signals such as SE, BSE, EBIC, with topography, electrical, magnetic, and mechanical properties measured by the AFM.
  • CPEM makes it possible to measure AFM and SEM simultaneously under the same specimen conditions, at the same measurement speed, etc.
  • The combined AFM and SEM scanning system enables an accurate image correlation and elimination of drift or other inaccuracies.
Product details

Contact us

Physical Electronics GmbH
Salzstraße 8
85622 Feldkirchen near Munich

Telephone: +49 89 96275 0

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