CPEM enables simultaneous detection and acquisition of AFM and SEM signals at the same time and in the same place.
How does it work?
During scanning, the electron beam points close to the AFM tip with a constant offset. They both remain static, while the sample is moving with Lite Scope’s piezo scanner. This way, data from AFM and SEM microscopes can be acquired at the same time, in the same place, and under the same conditions.