PHI 710 scanning Auger electron spectrometer is the only AES instrument in the world that specified < 8 nm of Auger spatial resolution. AES is the method for the highly sensitive and nondestructive investigation of the chemical composition of a material surface. AES is a technique for analyzing the element constituting the sample surface, its composition, and chemical bonding state by irradiating a focused electron beam on the sample surface. The irradiated electron beam can be focused to 3 nm or less, allowing for an ultra-microscopic area of the sample to be analyzed. The PHI 710 can provide superior quantitative data at various incidence angles and sample shapes using a Coaxial cylindrical mirror analyzer (CMA). The CMA is a unique electron spectrometer by Physical Electronics.